SEM for the 21st century-scanning ion microscopy

Abstract

Scanning electron microscopy has made and will continue to make major contributions to imaging science and technology, but because of the comparatively large wavelength of keV-energy electrons, SEMs cannot simultaneously offer high spatial resolution and a high depth of field. This is a major problem for nanoscience, biological, and all other fields of research where it must be assumed that all samples are three dimensional in nature. Ion beam microscopy can offer the promise of higher-resolution imaging and overcome the problem of depth of field while also providing significantly more surface detail, a wide range of novel and familiar contrast mechanisms, and the potential for new microanalytical techniques that combine nanometer spatial resolution and single monolayer sensitivity. © ASM International.