Limit to mass sensitivity of nanoresonators with random rough surfaces due to intrinsic sources and interactions with the surrounding gas

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Abstract

We investigate initially the influence of thermomechanical and momentum exchange noise on the limit to mass sensitivity Δm of nanoresonators with random rough surfaces, which are characterized by the roughness amplitude w, the correlation length ξ, and the roughness exponent 0

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Palasantzas, G. (2008). Limit to mass sensitivity of nanoresonators with random rough surfaces due to intrinsic sources and interactions with the surrounding gas. Journal of Applied Physics, 104(1). https://doi.org/10.1063/1.2930997

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