Microfabricated submicron al-filament biprism as applied to electron holography

Abstract

A novel type of electron biprism was made using a microprocess technique. This electron biprism is composed of several filaments lined in parallel on a silicon nitride membrane. Using this type of multi-biprism, we observed an electric field by electron interferometry and confirmed the potentiality of extending this technique to a local electric field. © 1991, IOP Publishing Ltd.