Microfabrication of ceramics by laser-assisted etching using an Nd: YAG laser and KOH solution

Abstract

Laser-assisted etching (LAE) using an Nd : YAG laser and KOH solution has been carried out in microfabrication of ceramic materials. Three types of LAE have been considered depending on the laser beam conditions and materials conditions. The following results have been obtained. (1) Microfabrications resembling microcantilevers, 30 μm wide 1000 μm long, were formed on thin ceramic substrates using a Q-switched single-mode beam. (2) Threedimensional figures were formed on substrates comprising laminations of several kinds of ceramic sheets, applying the differences of appropriate beam power conditions to a variety of ceramic materials. (3) High efficiency, high accuracy microfabrications were achieved by using ceramic masks made by LAE. © 1989, The Japan Society for Precision Engineering. All rights reserved.