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Modelling and Optimization of a Silicon Tuning Fork Gyroscope

  • Kugi A
  • Thull D
  • Seidel H
PAMM (2004) 4(1) 59-62
DOI: 10.1002/pamm.200410015
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Abstract

This contribution deals with the systematic derivation of an analytical model for a silicon tuning fork gyroscope with piezoelectric drive and piezoresistive read‐out. The mathematical model serves as a basis for optimizing the overall sensor structure, for testing the electronic circuitry and for investigating the influence of disturbances, e.g. due to fabrication tolerances, on the measurement quality. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Kugi, A., Thull, D., & Seidel, H. (2004). Modelling and Optimization of a Silicon Tuning Fork Gyroscope. PAMM, 4(1), 59–62. https://doi.org/10.1002/pamm.200410015

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