Low-Temperature Sputter-Deposition of Ni-Zn Ferrite Thin Films Using Electron-Cyclotron-Resonance Microwave Plasma.

  • Yamamoto S
  • Wada H
  • Kurisu H
  • et al.
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Yamamoto, S., Wada, H., Kurisu, H., Matsuura, M., & Shimosato, Y. (2003). Low-Temperature Sputter-Deposition of Ni-Zn Ferrite Thin Films Using Electron-Cyclotron-Resonance Microwave Plasma. Journal of the Magnetics Society of Japan, 27(4), 363–366. https://doi.org/10.3379/jmsjmag.27.363

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