Electron penetration and the atomic number correction in electron probe microanalysis

Abstract

The number of ionizations on a given j shell in any electron-bombarded target has been calculated analytically by means of the Bethe formulae. A general formula for the atomic number correction has been derived in the form of an equation using parameters that are functions of target composition and accelerating voltage. This equation allows the calculation of the penetration effect to be readily carried out. The electron range, in terms of beam energy, has also been calculated. Finally, it is shown that the correction is different in the case of thin-target analysis.