Observation of Low-Energy Electrons Transmission through Periodic Arrays Micro-Pattern Silicon Window

Abstract

This paper describe a new kind of electron transmission window (ETW) with periodic arrays micro-pattern and one-dimensional nanostructure, which is fabricated by microfabrication and chemical etching from a 500 ± 10\mu \text{m} -thick n-type Si wafer. The arrays field emission electrode (AFEE) is produced to emit well focused electrons, which is powered by nanosecond-pulse voltage (the absolute value ≤8.5KV). The ETW shows the transmission ability for low-energy electrons verified by transmission performance analysis and visualization diagnosis.