Design and fabrication of a MEMS 3D micro-transformer for low frequency applications

Abstract

This study presents the fabrication of a 3D micro-transformer using MEMS technology in 10-600 kHz frequency range. The fabrication processes is developed for high-performance and low-cost realization with respect to planner design. The coil winding and the magnetic cores were fabricated by electro-deposition using copper and Ni/Fe Permalloy materials, respectively. In step-up configuration, the micro-transformer achieved 73.75% efficiency. The inductance achieved was 90 and 164 μH for primary and secondary coils, respectively. Characterization results and fabrication process of the fabricated transformer (2560×1240 μm) on alumina ceramic substrate are presented.