Abstract
To achieve the dramatic increases in x-ray spectral resolution (<20 eV at 1.5k eV) desired by market segments such as the semiconductor industry, NIST developed a transition-edge sensor (TES) microcalorimeter. To bring this exciting, yet demanding, new technology to the industrial users, certain criteria must be addressed. Aspects of resolution, cooling and hold time, count rates as well as vibrations are considered. Data is presented to the present efforts to handle these issues as well as discussing development plans for the future.
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CITATION STYLE
Redfern, D., Nicolosi, J., Höhne, J., Weiland, R., Simmnacher, B., & Hollerich, C. (2002). The microcalorimeter for industrial applications. In Journal of Research of the National Institute of Standards and Technology (Vol. 107, pp. 621–626). National Institute of Standards and Technology. https://doi.org/10.6028/jres.107.050
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