Micro touch sensor array made by hydrothermal method

Abstract

We propose a micro touch sensor array, which is applicable in high temperature environment. The PZT thin film was made on the Ti substrate by the hydrothermal method, and the electrodes were deposited on its surfaces to form the sensor and the actuator. The actuator part is driven at the resonance frequency 1.045 [kHz] and the actuating voltage is low 5[V]. The sensing part can detect the impedance change before and after the contact. The sensor structure is simple and easy to miniaturize and it works under the high temperature [ under 82°C 1. This sensor can be used as the control touch sensor pad of the car instead of the conventional capacitive type touch pad, because it can resist high temperature. This paper reports the basic property of the sensor.