Influence of squeeze-film damping on the dynamic behavior of a curved micro-beam

Abstract

A fixed-fixed curved micro-beam resonator under the influence of harmonic electrostatic field is considered. Due to the presence of incompressible fluid between the micro-beams and the electrode, a squeeze-film damping affects the dynamic behavior of the resonator. The combined effect of curved geometry and fluid squeeze-film damping is investigated for micro-beams with concave and convex geometries. A reduced-order model is obtained through the application of Galerkin discretization on a coupled fluid-structure system composed of the nonlinear Euler-Bernoulli beam equation and Burgdorfer's model for the neighboring fluid. The dynamic behavior is assessed by investigating the influence of squeeze-film damping on the linear and nonlinear frequency response and the maximum resonant deflection of curved up and curved down micro-beams.