High-frequency piezoelectric displacement of PZT films measured using twin-beam laser doppler vibrometer

Abstract

The high frequency (∼100 kHz) dependence of Pb1.1(Zr 0.53,Ti0.47)O3 (PZT) piezoelectric characteristics was investigated. PZT films were prepared onto Pt/Ti/SiO 2/Si substrates using a chemical solution deposition process. A twin-beam laser doppler equipment system was developed for determining the piezoelectric characteristics of a PZT film and simultaneously evaluating its polarization and displacement characteristics. Moreover, the sample temperature was changed from-190°C to room temperature (RT). As the measurement frequency increased and the measurement temperature decreased, the remanent polarization (2Pr) and coercive field (2EC) were observed to increase and the effective longitudinal piezoelectric constant (d 33,Eff.) was observed to decrease. © 2010 The Ceramic Society of Japan. All rights reserved.