A Micro-Machined Optical Fiber Cantilever as a Miniaturized pH Sensor

Abstract

A micro-cantilever fabricated using a combination of picosecond-laser machining and focused ion beam milling directly onto the end of a standard telecommunications optical fiber is demonstrated as a liquid pH sensor. Conventional pH meters typically require relatively large reaction volumes up to ∼50 mL, which is not always convenient. The micro-scale nature of this sensor offers the potential for pH measurement on a smaller sample volume down to micro-liter. The fiber end-tip cantilever is coated with a pH sensitive layer, and the pH-induced deflection is monitored interfermetically. A detectable pH range from 4.0 to 10.0 is demonstrated for the cantilevers coated with 16-mercapto-hexadecanoic-1-acid as the functional layer, and a detectable pH range from 4.0 to 9.0 is demonstrated for the cantilevers coated with Al2O3 as the functional layer.