Flexible Wireless Wall Temperature Sensor for Unsteady Thermal Field

Abstract

We present a novel flexible wireless wall temperature sensor with high spatio- temporal resolution and its performance evaluation in an unsteady thermal field. A base part of the sensor is made of thermally-stable polyimide and the copper films. Using a Si hard mask fabricated by standard lithography and DRIE process, 1 mm-sized sensing resistor is sputtered on the copper coil. We enhance the time response for each measurement by reducing the frequency sweeping points. It is shown that the accuracy of the present temperature measurement is in acceptable range for most combustion studies, based on a series of error- estimation analyses. The temperature measurement uncertainty of ± 6.4 °C has been achieved with the measurement time interval as small as 2.48 ms.