Single electron transistor and fabrication technologies

Abstract

During the last ten years a new and exciting field of solid state physics and electronics has been thoroughly studied. The field is tunneling of single electrons or so-called "single electronics". By many researchers' efforts, the basic physics of this field is well understood at the present time, and now creation of useful single electron devices becomes important. In this brief review we discuss the basic physics of single electron tunneling and the single electron transistor, and the fabrication technologies of several kinds of single electron devices. Possible applications in analog and digital single electron devices are also discussed. © 1996 TAPJ.