Microstructures, mechannical properties and friction properties of TiVCN composite films

Abstract

A series of TiVN and TiVCN nano-composite films with different V and C contents were synthesized using a multi-target magnetron sputtering technique. The microstructures, mechanical properties and friction properties at different test temperatures were investigated by X-ray diffraction, nano-indentation, CSM high-temperature ball-on-disc tribo-meter and SEM-EDS analysis. The results showed that the hardness values of the TiVN and TiVCN films reached maximum of 25.02 GPa and 28.51 GPa at a V target power of 60 W and C target power of 20 W, respectively. With the further increase of C, however, the hardness of TiVCN films decreased gradually. At room temperature, the friction coefficient of the TiVCN film decreased with the increase power of C target. At high temperature, the friction coefficient of the TiVCN showed a up-down-up curve with the increase of test temperature. The effects and adaptive mechanisms of Magn'eli phase formed in the TiVCN films at high temperature were discussed. © Right.