Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors

Abstract

We have compared two kinds of dispersive mirrors (DMs) produced by magnetron sputtering and ion beam sputtering. One of them is a broadband DM which is known as double-angle DM, providing a group delay dispersion (GDD) of - 40 fs 2 in the range of 550–1050 nm. The other one is a robust highly dispersive mirror, which provides a GDD of about - 275 fs 2 at 800 nm and covers the wavelength range from 690 to 890 nm. For the first time, a comparison between magnetron-sputtering-produced and ion-beam-sputtering-produced dispersive mirrors is performed.