Protons, ions, electrons and the future of the SEM

Abstract

The Scanning Electron Microscope (SEM) is the most widely used high performance microscope in all fields of science but it is now reaching the theoretical limits of its performance. While advances in sources, optics, and detectors, can result in some improvement in performance the ultimate resolution is limited by fundamental physical constraints. One potential alternative is a scanning microscope utilizing light ions such as H+ and He+ . Such an instrument shares all of the benefits of the conventional SEM but is free from the constraints encountered when using electrons and could significantly extend the scope and success of scanning microscopy. © 2010 IOP Publishing Ltd.