Novel multi-user-MEMS-processes-compatible single-layer out-of-plane electrothermal actuator

Abstract

Microactuators are regarded as a key component in the field of microelectromechanical systems (MEMS). According to the motion of the actuator, it can be classified as an out-of-plane type or an in-plane type. Most of the existing out-of-plane thermal actuators are multi-layer structures. In this study, a novel electrothermal single-layer out-of-plane actuator is presented. The characteristics of this device are stated as follows: (1) This actuator consists of only a single thin film layer, therefore, it can prevent delaminating after a long-term operation. (2) The fabrication process is multi-user MEMS processes (MUMPs)-compatible, and it has the potential to integrate with many different micromachined components. (3) As demonstrated by the experiment, this device can be operated at a relatively low voltage. For the thermal actuator with beam length 275 μm, its deflection amplitude can reach 3.196 μm when driven at 5 V dc, and 5.316 μm when driven at 8 V dc. This structure offers the potential for application in adaptive optics systems and other optical systems. It also provides an interface to cooperate with integrated circuits and various optical elements to construct an embedded-control optical. © Society of Photo-Optical Instrumentation Engineers.