Effects of Element Doping on the Structure and Properties of Diamond-like Carbon Films: A Review

Abstract

Diamond-like carbon (DLC) films with excellent anti-friction and wear resistance, can effectively reduce the energy loss of tribosystems and the wear failure of parts, but the high residual stress limits their application and service life. Researchers found that doping heterogeneous elements in the carbon matrix can alleviate the defects in the microstructure and properties of DLC films (reduce the residual stress; enhance adhesion strength; improve tribological, corrosion resistance, hydrophobic, biocompatibility, and optical properties), and doping elements with different properties will have different effects on the structure and properties of DLC films. In addition, the comprehensive properties of DLC films can be coordinated by controlling the doping elements and their contents. In this paper, the effects of single element and co-doping of carbide-forming elements (Nb, W, Mo, Cr, Ti, Si) and non-carbide-forming elements (Cu, Al, Ag, Ni) on the properties of microstructure, mechanical, tribological, optical, hydrophobic, corrosion resistance, etc. of DLC films are reviewed. The mechanisms of the effects of doping elements on the different properties of DLC films are summarized and analyzed.