1.3 μm 10-Wavelength Laterally Coupled Distributed Feedback Laser Array with High-Duty-Ratio Gratings

Abstract

A 1.3 µm 10-wavelength laterally coupled distributed feedback (LC-DFB) laser array is realized by high-duty-ratio lateral gratings along both sides of the ridges on one AlGaInAs multiple quantum well (MQW) epi-wafer for Fabry–Perot lasers. The coupling coefficient is enhanced by adjusting the depth and duty ratio of lateral grating, and CH4/H2/Ar reactive ion etching (RIE) which provides high selectivity between InP and AlInAs is adopted for precise control of the grating depth. The stable single-mode operation of 10 wavelengths is demonstrated with the mean wavelength spacing of ≈3.4 nm and the average side mode suppression ratio (SMSR) ≈40.8 dB.