Flexible strain sensors with high performance based on metallic glass thin film

Abstract

Searching strain sensitive materials for electronic skin is of crucial significance because of the restrictions of current materials such as poor electrical conductivity, large energy consumption, complex manufacturing process, and high cost. Here, we report a flexible strain sensor based on the Zr55Cu30Ni5Al10 metallic glass thin film which we name metallic glass skin. The metallic glass skin, synthesized by ion beam deposition, exhibits piezoresistance effects with a gauge factor of around 2.86, a large detectable strain range (∼1% or 180° bending angle), and good conductivity. Compared to other e-skin materials, the temperature coefficient of resistance of the metallic glass skin is extremely low (9.04 × 10-6K-1), which is essential for the reduction in thermal drift. In addition, the metallic glass skin exhibits distinct antibacterial behavior desired for medical applications, also excellent reproducibility and repeatability (over 1000 times), nearly perfect linearity, low manufacturing cost, and negligible energy consumption, all of which are required for electronic skin for practical applications.