Optical second-harmonic probe for ultra-high frequency on-chip interconnects with benzocyclobutene

Abstract

We report the application of electric field-induced second-harmonic (EFISH) generation for time-resolved measurement of ultra-fast electrical pulses propagating on thin-film microstrip lines fabricated with a polymer based on benzocyclobutene as a dielectric layer on a silicon substrate. This contactless field detection enables the characterization of electric pulses on the transmission line up to 1.95 THz. In comparison to external electro-optic sampling the EFISH technique provides a better characterization tool concerning time-resolution and noninvasiveness. © 1998 American Institute of Physics.