Pb52(Zr,Ti)48O3 ferroelectric dipole electret exploiting surface pillar array structure for electrostatic vibration energy harvesters

Abstract

In this paper, we present ferroelectric dipole electrets (FDEs) with patterned Pb52(Zr,Ti)48O3 (PZT) pillar arrays. Their output power generation capability was higher than that of flat FDEs when used for electrostatic vibration energy harvesters (e-VEHs). This excellent capability was achieved since the patterned pillar structure increased the electric field near the electret surface. The surface potential (Vs) became as high as 1035 V when the surface charge density was 6.9 mC/m2. This surface charge density was 1.3-fold higher than that of flat FDEs and sixfold higher than that of conventional CYTOP polymer electrets (CPEs). Consequently, VEHs (20 × 20 × 1 mm3) showed a maximum power of 102 µW at an acceleration of 0.6 g (1 g = 9.8 m/s2) and a frequency of 20 Hz. These results will open a new strategy for the use of FDEs in e-VEHs.