Optimal design and development of electromagnetic linear actuator for mass flow controller

Abstract

In this paper, we constructed the analytic model of control valve as a function of electric and geometric parameters, and analyzed the influence of the design parameters on the dynamic characteristics. For improving the dynamic characteristics, optimal design is conducted by applying sequential quadratic programming method to the analytic model. This optimal design aims to minimize the response time and maximize force efficiency. By this procedure, control valve can be designed to have fast response in motion.