Enhanced TEM sample preparation using in-situ low energy argon ion milling

Abstract

Sample preparation is a critical step in transmission electron microscopy (TEM) that significantly determines the quality of structural characterization and analysis of a specimen. In recent years, the accuracy and quality requirements for the preparation of TEM cross-sections of nanoelectronic structures have drastically increased. Combining a focused low-energy noble gas ion beam column with a FIB and a SEM column in a three beam system meets these requirements. It provides precise target preparation as well as minimum thickness and surface damage of the TEM sample. © 2009 American Institute of Physics.