Elastic peak electron spectroscopy

Abstract

Elastic peak electron spectroscopy (EPES) determines the elastic peak intensity N (Ep) in absolute units (percentage). The experimental curve N (Ep) is affected by the type of electron spectrometer used (CMA, RFA, etc.) and represents the probability Pe (E, Z) of elastic electron reflection detected by the angular window of the spectrometer. Pe (E, Z) = NAσeff (E, Z) Δ is the product of the inelastic mean free path Δ, the density NA of atoms and the effective elastic scattering cross‐section σeff (E, Z). Elementary processes of elastic scattering are treated with a simplified model based on a single scattering process. A more refined analysis will be to use the Monte‐Carlo approach. σeff is given by the differential elastic scattering cross‐section determined by the atomic number Z, the energy Ep, and the input and scattering angles. Results of σeff (E, Z) are presented based on tabulated differential cross‐section data published in the literature. Angular effects are discussed. A number of EPES applications are described for AES, plasmon‐, ionization‐, and low energy loss spectroscopies and SEM. EPES has been successful in the experimental determination of the inelastic mean free path Δ for a number of elements and compounds. Copyright © 1986 Foundation for Advances in Medicine and Science, Inc.