Pneumatic gate valve mounted inside an ultrahigh-vacuum chamber

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Abstract

A simple modification of a commercial gate valve which allows the pneumatic actuating mechanism to be mounted in an ultrahigh-vacuum system is described.

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APA

Zinck, J. J., & Weinberg, W. H. (1984). Pneumatic gate valve mounted inside an ultrahigh-vacuum chamber. Review of Scientific Instruments, 55(5), 810–811. https://doi.org/10.1063/1.1137807

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