A Highly Integrated AFM-SEM Correlative Analysis Platform

Abstract

We describe the first truly correlative atomic force micro­scopy-scanning electron microscopy (AFM-SEM) platform designed from first principles and from the ground up for the study of sample properties under a wide range of magnifications. Combining these two microscopy techniques, “in situ,” into a highly integrated workstation opens unprecedented measurement capabilities at the nanoscale, while simplifying experiment workflows to yield a higher level of data throughput. Unlike SEM, the AFM offers true three-dimensional topo­graphy images, something SEM can only provide indirectly. This allows for the characterization of nano-mechanical properties, as well as for magnetic and electrical characterization of samples, which are increasingly of interest in material science, multi-component technologies (that is, solar cell and battery research), and pharmaceutical investigations. On the other hand, the SEM’s wide field-of-view is critical in identifying regions of interest with feature sizes of less than a micron, which are notoriously difficult to find over large spatial scales in conventional AFM systems. In addition, the SEM’s ability to visualize the AFM tip facilitates its navigation to aid the characterization of samples with challenging three-dimensional topographies. In this paper, we describe the major elements of the system design and demonstrate how correlative microscopy can help the characterization of samples with challenging morphologies such as the edge of a razor blade or the nanomechanical analysis of platinum nanopillars.