The influence of the composition of Ru100-xAlx (x = 50, 55, 60, 67) thin films on their thermal stability

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Abstract

RuAl thin films possess a high potential as a high temperature stable metallization for surface acoustic wave devices. During the annealing process of the Ru-Al films, Al2O3 is formed at the surface of the films even under high vacuum conditions, so that the composition of a deposited Ru50Al50 film is shifted to a Ru-rich alloy. To compensate for this effect, the Al content is systematically increased during the deposition of the Ru-Al films. Three Al-rich alloys-Ru45Al55, Ru40Al60 and Ru33Al67-were analyzed concerning their behavior after high temperature treatment under high vacuum and air conditions in comparison to the initial Ru50Al50 sample. Although the films' cross sections show a more homogeneous structure in the case of the Al-rich films, the RuAl phase formation is reduced with increasing Al content.

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Seifert, M., Rane, G. K., Oswald, S., Menzel, S. B., & Gemming, T. (2017). The influence of the composition of Ru100-xAlx (x = 50, 55, 60, 67) thin films on their thermal stability. Materials, 10(3). https://doi.org/10.3390/ma10030277

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