Cooling techniques for excilamps driven by dielectric barrier discharge

Abstract

Our study describes effective techniques to transfer heat away from UV emitters based on dielectric barrier discharge excilamps. It presents findings from an investigation into the efficiency of excilamp radiation when cooled by air, inert gas, and liquid refrigerants. The devised cooling techniques were used to create radiation sources with a UV power density of up to 117 mW/cm(2). (C) The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License.