Abstract
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ∼82 μm) LN resonator possesses a Q factor of ∼2.5 × 105 around 1550nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
Cite
CITATION STYLE
Lin, J., Xu, Y., Fang, Z., Wang, M., Song, J., Wang, N., … Cheng, Y. (2015). Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining. Scientific Reports, 5. https://doi.org/10.1038/srep08072
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
