Printed Thick Film Resistance Temperature Detector for Real-Time Tube Furnace Temperature Monitoring

Abstract

Accurately acquiring crucial data on tube furnaces and real-time temperature monitoring of different temperature zones is vital for material synthesis technology in production. However, it is difficult to achieve real-time monitoring of the temperature field of tube furnaces with existing technology. Here, we proposed a method to fabricate silver (Ag) resistance temperature detectors (RTDs) based on a blade-coating process directly on the surface of a quartz ring, which enables precise positioning and real-time temperature monitoring of tube furnaces within 100–600 °C range. The Ag RTDs exhibited outstanding electrical properties, featuring a temperature coefficient of resistance (TCR) of 2854 ppm/°C, an accuracy of 1.8% FS (full scale), and a resistance drift rate of 0.05%/h over 6 h at 600 °C. These features ensured accurate and stable temperature measurement at high temperatures. For demonstration purposes, an array comprising four Ag RTDs was installed in a tube furnace. The measured average temperature gradient in the central region of the tube furnace was 5.7 °C/mm. Furthermore, successful real-time monitoring of temperature during the alloy sintering process revealed approximately a 20-fold difference in resistivity for silver-palladium alloys sintered at various positions within the tubular furnace. The proposed strategy offers a promising approach for real-time temperature monitoring of tube furnaces.