Basics of plasma spectroscopy

Abstract

These lecture notes are intended to give an introductory course on plasma spectroscopy. Focusing on emission spectroscopy, the underlying principles of atomic and molecular spectroscopy in low temperature plasmas are explained. This includes choice of the proper equipment and the calibration procedure. Based on population models, the evaluation of spectra and their information content is described. Several common diagnostic methods are presented, ready for direct application by the reader, to obtain a multitude of plasma parameters by plasma spectroscopy. © 2006 IOP Publishing Ltd.