High efficiency x-ray nanofocusing by the blazed stacking of binary zone plates

Abstract

The focusing efficiency of binary Fresnel zone plate lenses is fundamentally limited and higher efficiency requires a multi step lens profile. To overcome the manufacturing problems of high resolution and high efficiency multistep zone plates, we investigate the concept of stacking two different binary zone plates in each other's optical near-field. We use a coarse zone plate with π phase shift and a double density fine zone plate with π/2 phase shift to produce an effective 4- step profile. Using a compact experimental setup with piezo actuators for alignment, we demonstrated 47.1% focusing efficiency at 6.5 keV using a pair of 500 μm diameter and 200 nm smallest zone width. Furthermore, we present a spatially resolved characterization method using multiple diffraction orders to identify manufacturing errors, alignment errors and pattern distortions and their effect on diffraction efficiency. © 2013 SPIE.