Excimer Lasers – The powerful light source in the UV and VUV

Abstract

Abstract Excimer lasers are pulsed gas lasers operating with a special mixture of noble gases and halogens. They emit laser radiation in the UV and VUV spectra, at discrete wavelengths between 351 nm and 157 nm. Continuous improvements over recent years have resulted in excimer lasers becoming the tool of choice for many applications.