Implementation of fully-differential capacitance sensing accelerometer using glass proof-mass with SI-VIAS

Abstract

This study presents a novel fully-differential capacitive sensing accelerometer design consisting of glass proof-mass and Si-vias. The accelerometer with glass proof-mass has three merits, (1) the insulation glass proof-mass and conducting Si vias enable the gap-closing fully-differential electrodes design, (2) the electrical routings on insulation glass proof-mass can reduce parasitic capacitance, (3) the proof-mass is significantly increased by the nearly whole wafer thick glass material. In application, the fully-differential accelerometer with glass proof-mass is fabricated and characterized. The preliminary measurement results demonstrate the sensitivity of accelerometer is 14.44mV/G with a nonlinearity of 4.91%.