A novel graphene pressure sensor with zig-zag shaped piezoresistors for maximum strain coverage for enhancing the sensitivity of the pressure sensor

Abstract

The demand for flexible and wearable sensors is increasing day by day due to varied applications in the biomedical field. Especially highly sensitive sensors are required for the detection of the low signal from the body. It is important to develop a pressure sensor that can convert the maximum input signal into the electrical output. In this paper, the design and performance of graphene piezoresistive pressure sensors have been investigated by zig-zag piezoresistors on the square diaphragm. On the applied pressure, deformation is sensed by the piezoresistors above the diaphragm. Finite element analysis is carried out to investigate the effect of zig-zag piezoresistors on the square diaphragm. Simulated results for the optimized design are obtained for an operating range of 0-100 psi for pressure sensitivity.