Simultaneous formation of surface ripples and metallic nanodots induced by phase decomposition and focused ion beam patterning

Abstract

We report the simultaneous formation of self-assembled surface ripples in Cd2 Nb2 O7 pyrochlore caused by focused ion beam (FIB) patterning and uniformly distributed metallic nanodots induced by phase decomposition under ion bombardment. The characteristic wavelength of the surface ripples is controllable from the nm to the sub-μm scale. High-density Cd metallic nanoparticles, ∼5 nm, formed and the distribution of nanoparticles is consistent with the morphological characteristics of the ripple pattern. This approach provides a means of fabricating surface nanostructure with various patterns and a controllable particle size and distribution by combining ion beam-induced phase decomposition with high-precision FIB patterning. © 2006 American Institute of Physics.