Performance limitations of piezoelectric and force feedback electrostatic transducers in different applications

Abstract

Current limitations in piezoelectric and electrostatic transducers are discussed. A force-feedback electrostatic transducer capable of operating at bandwidths up to 20 kHz is described. Advantages of the proposed design are a linearised operation which simplifies the feedback control aspects and robustness of the performance characteristics to environmental perturbations. Applications in nanotechnology, optical sciences and acoustics are discussed. © 2009 IOP Publishing Ltd.