Analysis of distortion based on 2d mems micromirror scanning projection system

Abstract

To analyze the distortion problem of two-dimensional micro-electromechanical system (MEMS) micromirror in-plane scanning, this paper makes a full theoretical analysis of the distortion causes from many aspects. Firstly, the mathematical relations among the deflection angle, laser incidence angle, and plane scanning distance of the micromirror are constructed, and the types of projection distortion of the micromirror scanning are discussed. Then the simulation results of reflection angle distribution and point cloud distribution are verified by MATLAB software under different working conditions. Finally, a two-dimensional MEMS micromirror scanning projection system is built. The predetermined waveform can be scanned and projected successfully. The distortion theory is proved to be correct by analyzing the distortion of the projection images, which lays a foundation for practical engineering application.