Multiprobe scanning probe microscope using a probe-array head

Abstract

We have developed a microelectromechanical system (MEMS)-based multiprobe scanning probe microscope (SPM) to improve imaging efficiency. The SPM head contains seven identical MEMS probes, and each of them integrates a displacement sensor and a Z-axis actuator. Force constant mode is designed based on the force feedback strategy rather than on the position feedback strategy for this kind of SPM head. A nano-measuring machine is equipped with the lateral XY scanners, which can reach a motion range of 25 mm × 25 mm. After calibration, the measurement of one-dimensional grating has been made to demonstrate the capability of multiprobe scanning.