Growth of crystalline SrTiO 3 thin film on Si(100) by pulsed laser deposition

  • Imanaka A
  • Sasaki T
  • Hottta Y
  • et al.
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Abstract

By using only PLD, we fabricated the Sr-buffered 2×1 reconstructed Si(100) substrates starting with SrO layer and grew crystalline STO layers on the substrates.

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Imanaka, A., Sasaki, T., Hottta, Y., & Sato, S. (2015). Growth of crystalline SrTiO 3 thin film on Si(100) by pulsed laser deposition. Japan Society of Applied Physics. https://doi.org/10.7567/ssdm.2013.ps-8-11

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