Characteristics of Ozone Generation using a Micro Hollow Cathode Discharge

Abstract

A new type of ozone generator using a micro hollow cathode discharge has been developed and evaluated on its operating characteristics. The electrode system consists of two thin metal cathodes and a ceramic spacer with a center hole of a few 100 μm diameter. By feeding high-pressure oxygen gas through the center hole, the residence time of the oxygen gas within the discharge space decreases to the order of micro second. The ozone generation efficiency increases up to 45 g/kWh at the ozone concentration of 7.6 g/Nm3 without any cooling systems. In this ozone generating system, the ozone decomposition mechanisms such as electron impacts and the heat rise of oxygen gas are effectively removed by decreasing the gas-residence time. © 2003, The Institute of Electrical Engineers of Japan. All rights reserved.