A nonlinear global model of single frequency capacitively coupled plasma and its experimental validation

Abstract

The behavior of a single frequency capacitively coupled plasma (CCP) driven by 13.56 MHz rf source is investigated using an approach that integrates a nonlinear global analytical model and experimental data. The non linear model consists of a description of the plasma bulk, based on a fluid dynamics approach coupled to a separate model of the sheath. The parameters used in the model are obtained by operating the single frequency CCP experiment (13.56 MHz) in argon at working pressures 73 to 400m torr. Experimentally measured plasma parameters such as the electron density, electron temperature, the discharge symmetry parameter as well as the rf voltage waveforms are the inputs of the theoretical model. Model results of the DC self bias and rf current for various operating pressures and powers are shown. A comparison of the outputs of the numerical results is done with the experimentally obtained values of the DC self bias and rf current. A good quantitative correspondence between them is obtained. The results presents may substantially improve the understanding of the behavior of the capacitively coupled plasma.