On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography

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Abstract

Thermal scanning lithography is used to pattern semiconducting nanoribbon-like pentacene structures with ultrahigh spatial resolution onto arbitrary substrates in air. The method allows control of the pentacene crystal growth direction and domain-size distribution. By combining these quasi-one-dimensional nanoribbon-like structures with conductive electrodes and a suitable gate dielectric, functional p-channel transistors are demonstrated. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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Shaw, J. E., Stavrinou, P. N., & Anthopoulos, T. D. (2013). On-demand patterning of nanostructured pentacene transistors by scanning thermal lithography. Advanced Materials, 25(4), 552–558. https://doi.org/10.1002/adma.201202877

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