Synthesis of titanium nitride powders under glow discharge plasma

Abstract

Titanium nitride powders have been produced in the temperature range of 973-1273 K by using a glow discharge plasma (ionnitriding). Structures of the nitrided powders have been characterized by means of X-ray diffraction, optical microscopy and scanning electron microscopy. It was found that fine powder particles were fully nitrided at 1173 K for 16 h whereas coarse powder particles retained some of the nitrogen stabilized α-phase. Powders nitrided at lower temperatures and for shorter times showed thin layers of titanium nitride followed by stabilized α-phase and transformed β-phase. © 1990.