CVD synthesis of single wall carbon nanotubes devoted to ULSI electronic applications

Abstract

We report a comparison of the behaviour of different catalysts for the ethanol-CVD growth of single-wall carbon nanotubes (SWCNTs) on thermally grown silicon dioxide on silicon substrate. The samples have been prepared by spin-coating organometallic salt (Co, Fe, Mo, Ni acetate, and their bimetallic mixtures) water solutions (ethanol solution for Mo). As grown samples have been characterized by Raman spectroscopy, Atomic Force Microscopy and Scanning Electron Microscopy. Assuming as target the growth of high quality isolated nanotubes, the ratio in Raman spectra between the intensity of the G peak and of the D peak, has been used as main parameter to evaluate the performance of the catalytic process. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.