Ultrathin tunable conducting oxide films for near-IR applications: an introduction to spectroscopy shape theory

Abstract

We report tunable RF-sputtered AZO nanofilms through of deposition conditions. Perfect adsorption of light was simulated in ENZ mode. The coupling condition of thickness and wavelength in perfect absorption was obtained by a Drude model. The fitted parameters range as follows: charge density, from 1.6 × 1020 to 4.4 × 1020 cm−3; mobilities, from 8.23 to 12.76 cm2 V−1 s−1; and resistivities, from 14.20 to 34.98 Ω cm. The so-called spectroscopy shape analysis is introduced for automatic detection of elusive XPS peaks and sample surface-etching classification.